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About this Physics and Astronomy article
4675072 Trench etch endpoint detection by lif : Reid S Bennett, Linda M Ephrath, Geraldine C Schwartz, Gary S Selwyn assigned to International Business Machines Corporation is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 1359-0189)
- Published
- 1987
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)