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About this Engineering article
Trace Rare Gases Optical Emission Spectroscopy for Determination of Electron Temperatures and Species Concentrations in Chlorine-Containing Plasmas by Donnelly, Vincent M.; Malyshev, Mikhail V.; Kornblit, Avi; Ciampa, Nicolas A.; Colonell, Jennifer I.; Lee, John T. C. is a Engineering article available to read on EtoBox.
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- Author
- Donnelly, Vincent M.; Malyshev, Mikhail V.; Kornblit, Avi; Ciampa, Nicolas A.; Colonell, Jennifer I.; Lee, John T. C.
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1998
- Field
- Engineering (Physical Sciences)