Opening book details…
About this Engineering article
Si substrate preparation for GaAs/Si by metalorganic chemical vapor deposition by Fujita, K.; Shiba, Y.; Yamamoto, T. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Fujita, K.; Shiba, Y.; Yamamoto, T.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0022-0248)
- Published
- 1990
- Field
- Engineering (Physical Sciences)