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Cationic Chemistry and Chemically Amplified Resist Materials for Microlithography: Synthesis and Applications of Copolymers of 4-(1-Hydroxy-1-methylethyl)styrene and Styrene or 4-Hydroxystyrene by Masahiro Yoshida; Jean M.J. Fréchet is a Materials Science article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Materials Science.

Author
Masahiro Yoshida; Jean M.J. Fréchet
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0032-3861)
Published
1994
Language
EN
Field
Materials Science (Physical Sciences)

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