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What is Silicon about?

This document discusses silicon as a mechanical material for micromechanical structures and devices. Some key points: 1) Silicon has excellent mechanical properties like strength, hardness, and thermal conductivity that make it suitable for micromechanical applications beyond its traditional use in electronics. 2) Techniques developed for silicon integrated circuits, like thin-film deposition and photolithography, allow complex mechanical structures to be batch fabricated on silicon wafers. 3) Many com

Author

Longnan LI

Language

EN