About this scholarly article

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Microelectronic Structures and MEMS for Optical Processing III - Fabrication of microrelief surfaces using a one-step lithography process by Reimer, Klaus; Hofmann, Ulrich; Juerss, M.; Pilz, Wolfgang; Quenzer, Hans Joachim; Wagner, Bernd; Motamedi, M. Edward; Herzig, Hans Peter is a scholarly article available to read on EtoBox.

Author

Reimer, Klaus; Hofmann, Ulrich; Juerss, M.; Pilz, Wolfgang; Quenzer, Hans Joachim; Wagner, Bernd; Motamedi, M. Edward; Herzig, Hans Peter

Publisher

SPIE

Published

1997

Language

EN