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About this Engineering article
Thorough Investigations on the Resolution of Replicated Resist Patterns in Conventional X-ray Lithography by Koichi Okada; Junji Matsui is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Koichi Okada; Junji Matsui
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 1985
- Field
- Engineering (Physical Sciences)