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Can I read Chemical vapour deposition of molybdenum carbides using C60 as a carbon source on EtoBox?
Chemical vapour deposition of molybdenum carbides using C60 as a carbon source by L. Norin; U. Jansson; J.-O. Carlsson is a Engineering article available to read on EtoBox.
What is Chemical vapour deposition of molybdenum carbides using C60 as a carbon source about?
Single-phase molybdenum carbidefilms weredeposited on sapphire by CVD from a C(>()/MoCl s I H;z; gas mixture. Mo 2C couldbe grown at substratetemperatures of 600 and 800 "C usingtotal pressures of )00 and 10Torr. respectively. Metastable B-MoC 1 \_ x wasalso deposited at 800 °C by loweringthe total pressure to 2 Torr, For a constant massflow of carrier gas, a high total pressure resulted in anincreased growth rate of MolC at 600°C. whereas a low total pressure favoured the growth of &MoC I \_ x at 800°C. The films were lustrousand showedgood adhesion [0 the substrate. Resistivities of 56-140 f.Ln em were measured for the single-phase films.
Who reads Chemical vapour deposition of molybdenum carbides using C60 as a carbon source?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- L. Norin; U. Jansson; J.-O. Carlsson
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 1997
- Language
- EN
- Field
- Engineering (Physical Sciences)