About this scholarly article

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Metrology, Inspection, and Process Control for Microlithography XVII - Nano precision AFM imaging by stereo deconvolution: theory; applications, and experimental validation by Aumond, Bernardo D.; Youcef-Toumi, Kamal; Herr, Daniel J. is a scholarly article available to read on EtoBox.

Author

Aumond, Bernardo D.; Youcef-Toumi, Kamal; Herr, Daniel J.

Publisher

SPIE

Published

2003

Language

EN