About this scholarly article

Digest. International Electron Devices Meeting, - Modeling of ultrahighly doped shallow junctions for aggressively scaled CMOS by Kennel, H.W.; Cea, S.M.; Lilak, A.D.; Keys, P.H.; Giles, M.D.; Hwang, J.; Sandford, J.S.; Corcoran, S. is a scholarly article available to read on EtoBox.

Author

Kennel, H.W.; Cea, S.M.; Lilak, A.D.; Keys, P.H.; Giles, M.D.; Hwang, J.; Sandford, J.S.; Corcoran, S.

Publisher

IEEE

Published

2002

Language

EN