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About this Engineering article
Film deposition by plasma techniques. By Mitsuharu Konuma, Springer, Heidelberg 1992, 185 figs., X, 224 pp., hardcover, DM 98,00—ISBN 3‐540‐54057‐1 by Mike Tamor is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Mike Tamor
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); Wiley-Blackwell; Wiley; Research Square (ISSN 0935-9648)
- Published
- 1993
- Field
- Engineering (Physical Sciences)