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Proceedings of Semiconducting and Semi-Insulating Materials Conference - Raman scattering analysis of SiGe annealed and implanted layers by Valakh, M.Ya.; Romaniuk, B.N.; Artamonov, V.V.; Klyui, N.I.; Perez-Rodriguez, A.; Calvo-Barrio, L.; Serre, C.; Morante, J.R.; Dietrich, B. is a scholarly article available to read on EtoBox.

Author
Valakh, M.Ya.; Romaniuk, B.N.; Artamonov, V.V.; Klyui, N.I.; Perez-Rodriguez, A.; Calvo-Barrio, L.; Serre, C.; Morante, J.R.; Dietrich, B.
Publisher
IEEE
Published
1996

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