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Mechanical Issues in Surface Micromachining by ShankarAthava is a document available to read on EtoBox.
1. There are three main mechanical problems in surface micromachining: adhesion of layers, interfacial stresses, and stiction. 2. Adhesion can cause delamination at interfaces due to thermal and mechanical stresses weakening the bond. Interfacial stresses are residual stresses from fabrication that cause warping. 3. Stiction occurs when sacrificial layers are removed, causing structures to stick together due to forces like van der Waals.
- Author
- ShankarAthava
- Language
- EN