About this scholarly article

2020 IEEE International Reliability Physics Symposium (IRPS) - A new technique for evaluating stacked nanosheet inner spacer TDDB reliability by Shen, Tian; Watanabe, Koji; Zhou, Huimei; Belyansky, Michael; Stuckert, Erin; Zhang, Jingyun; Greene, Andrew; Basker, Veeraraghavan; Wang, Miaomiao is a scholarly article available to read on EtoBox.

Author

Shen, Tian; Watanabe, Koji; Zhou, Huimei; Belyansky, Michael; Stuckert, Erin; Zhang, Jingyun; Greene, Andrew; Basker, Veeraraghavan; Wang, Miaomiao

Publisher

IEEE

Published

2020