About this Engineering article
Zinc oxide thin film-based MEMS acoustic sensor with tunnel for pressure compensation by Aarti Arora; Anil Arora; V.K. Dwivedi; P.J. George; K. Sreenivas; Vinay Gupta is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Aarti Arora; Anil Arora; V.K. Dwivedi; P.J. George; K. Sreenivas; Vinay Gupta
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)