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About this Materials Science article
Ar plasma irradiation effects in atomically controlled Si epitaxial growth by Daisuke Muto; Masao Sakuraba; Takuya Seino; Junichi Murota is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Daisuke Muto; Masao Sakuraba; Takuya Seino; Junichi Murota
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0169-4332)
- Published
- 2004
- Language
- EN
- Field
- Materials Science (Physical Sciences)
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