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What is High Purity Sputtering Targets Guide about?

The document outlines the ASTM standard F 2113-01, which serves as a guide for analyzing and reporting the impurity content and grade of high purity metallic sputtering targets used in electronic thin film applications. It specifies purity grade levels, analytical methods, and impurity content reporting formats, while also addressing the need for agreements between purchasers and suppliers regarding acceptable limits and analysis methods. The standard has been superseded or discontinued, and users are advis

Author

septhiadi

Language

EN