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About this Engineering article
Analysis of the infrared transmission data of hydrogenated amorphous silicon film fabricated by high rate PECVD by W. Hu; Florence Y. M. Chan; D. P. Webb; Y. C. Chan; Y. W. Lam is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- W. Hu; Florence Y. M. Chan; D. P. Webb; Y. C. Chan; Y. W. Lam
- Publisher
- Springer US; Springer-Verlag; Springer New York LLC; Springer Science and Business Media LLC (ISSN 0361-5235)
- Published
- 1996
- Field
- Engineering (Physical Sciences)
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