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About this Engineering article
Lithographic properties of chemically amplified resists based on copolymers of 4-tert-butoxycarbonyloxystyrene (TBS) and sulfur dioxide (SO2) by A.E. Novembre; J.E. Hanson; J.M. Kometani; W.W. Tai; O. Nalamasu; G.N. Taylor; E. Reichmanis; L.F. Thompson; D.N. Tomes is a Engineering article available to read on EtoBox.
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- Author
- A.E. Novembre; J.E. Hanson; J.M. Kometani; W.W. Tai; O. Nalamasu; G.N. Taylor; E. Reichmanis; L.F. Thompson; D.N. Tomes
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 1992
- Field
- Engineering (Physical Sciences)