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About this Engineering article
IR laser induced decomposition of tetrakis(dimethylamido)titanium for chemical vapor deposition of TiNx by M. Janovská; Z. Bastl is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- M. Janovská; Z. Bastl
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 1350-4495)
- Published
- 1996
- Language
- EN
- Field
- Engineering (Physical Sciences)