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Spectroscopic characterization of CVD-molybdenum oxide films by T. Ivanova; A. Szekeres; M. Gartner; D. Gogova; K.A. Gesheva is a Engineering article available to read on EtoBox.

What is Spectroscopic characterization of CVD-molybdenum oxide films about?

By chemical vapor deposition at atmospheric pressure using Mo(CO) 6 precursor and Ar/O 2 gas mixture, thin MoO 3 films were prepared on Si substrates. The deposition and sublimator temperatures were in the range of 150-200 and 70-90°C, respectively. Investigations of the as-deposited MoO 3 films were performed by spectroscopic ellipsometry (300-800 nm) and infrared spectrophotometry (200-1200 cm -1 ). The refractive index of the films was found to be in the range of 1.7-2.3 and the optical band gap energy, E og , estimated from the absorption analysis, was in the range of 2.76-3.14 eV. The infrared spectra exhibit the characteristic peaks for b-modification of polycrystalline material.

Who reads Spectroscopic characterization of CVD-molybdenum oxide films?

Author

T. Ivanova; A. Szekeres; M. Gartner; D. Gogova; K.A. Gesheva

Publisher

Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0013-4686)

Published

2001

Language

EN

Field

Engineering (Physical Sciences)