About this scholarly article

SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Laser Applications in Microelectronic and Optoelectronic Manufacturing IV - Excimer laser micromachining: a 15-year perspective by Gower, Malcolm C.; Dubowski, Jan J.; Helvajian, Henry; Kreutz, Ernst-Wolfgang; Sugioka, Koji is a scholarly article available to read on EtoBox.

Author

Gower, Malcolm C.; Dubowski, Jan J.; Helvajian, Henry; Kreutz, Ernst-Wolfgang; Sugioka, Koji

Publisher

SPIE

Published

1999

Language

EN