About this scholarly article

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Metrology, Inspection, and Process Control for Microlithography XXVIII - Parallel SPM cantilever arrays for large area surface metrology and lithography by Cain, Jason P.; Sanchez, Martha I.; Gotszalk, Teodor; Ivanov, Tzvetan; Rangelow, Ivo W. is a scholarly article available to read on EtoBox.

Author

Cain, Jason P.; Sanchez, Martha I.; Gotszalk, Teodor; Ivanov, Tzvetan; Rangelow, Ivo W.

Publisher

SPIE

Published

2014

Language

EN