Can I read ITRS 2003 Front End Process Overview on EtoBox?
ITRS 2003 Front End Process Overview by lkb9999 is a document available to read on EtoBox.
What is ITRS 2003 Front End Process Overview about?
The document summarizes the key challenges facing front-end processing (FEP) according to the 2003 International Technology Roadmap for Semiconductors (ITRS). Over the next few years, major challenges include introducing high-k gate dielectrics, dual metal gates, new DRAM capacitor structures, and cleaning processes for new materials. Sub-10nm lithography and 3D
- Author
- lkb9999
- Language
- EN