About this scholarly article

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - A high-speed mass flow sensor with heated silicon carbide bridges by Lyons, C.; Friedberger, A.; Welser, W.; Muller, G.; Krotz, G.; Kassing, R. is a scholarly article available to read on EtoBox.

Author

Lyons, C.; Friedberger, A.; Welser, W.; Muller, G.; Krotz, G.; Kassing, R.

Publisher

IEEE

Published

1998