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Can I read 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) on EtoBox?
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) by Xu, Chao (author);Wang, Junbo (author);Chen, Deyong (author);Chen, Jian (author);Qi, Wenjie (author);Liu, Bowen (author);She, Xu (author);Liang, Tian (author) is a nonfiction available to read on EtoBox.
What is 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) about?
This paper developed a method to fabricate the MEMS based sensitive electrodes for the electrochemical seismic sensors with the anodic bonding technology. In comparison to previously reported counterparts, the proposed sensing electrodes adopted the three-layer bonding structure of silicon-glass-silicon applied as the substitute of multilayer manual assembly structure, which have the advantages of simplified assembly processes of sensing unit and high consistency as the no requirement of manual alignment. The results shown that the cross-correlation coefficient between two proposed devices was quantified as 0.9998 with the sensitivity of 5956 V/(m/s) @1Hz, it is able to achieve both high sensitivity and high integration.
Who reads 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)?
It is typically read by self-directed learners exploring a subject in depth.
Common subject areas: history, science, philosophy, social sciences.
- Author
- Xu, Chao (author);Wang, Junbo (author);Chen, Deyong (author);Chen, Jian (author);Qi, Wenjie (author);Liu, Bowen (author);She, Xu (author);Liang, Tian (author)
- Publisher
- IEEE
- Published
- 2021
- Language
- EN
- Category
- nonfiction