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About this Engineering article
Paraelectric/antiferroelectric/ferroelectric phase transformation in As-deposited ZrO2 thin films by the TiN capping engineering by Wang, Chun-Yuan; Wang, Chin-I; Yi, Sheng-Han; Chang, Teng-Jan; Chou, Chun-Yi; Yin, Yu-Tung; Shiojiri, Makoto; Chen, Miin-Jang is a Engineering article available to read on EtoBox.
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- Author
- Wang, Chun-Yuan; Wang, Chin-I; Yi, Sheng-Han; Chang, Teng-Jan; Chou, Chun-Yi; Yin, Yu-Tung; Shiojiri, Makoto; Chen, Miin-Jang
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0261-3069)
- Published
- 2020
- Field
- Engineering (Physical Sciences)