Opening book details…
About this Engineering article
Application of Novel Ultrasonic Cleaning Equipment Using Waveguide mode for Post-Chemical-Mechanical-Planarization Cleaning by Suzuki, Kazunari; Han, Ki; Okano, Shoichi; Soejima, Jyunichiro; Koike, Yoshikazu is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Suzuki, Kazunari; Han, Ki; Okano, Shoichi; Soejima, Jyunichiro; Koike, Yoshikazu
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2009
- Field
- Engineering (Physical Sciences)
More by Suzuki, Kazunari; Han, Ki; Okano, Shoichi; Soejima, Jyunichiro; Koike, Yoshikazu
Browse all works by Suzuki, Kazunari; Han, Ki; Okano, Shoichi; Soejima, Jyunichiro; Koike, Yoshikazu