About this scholarly article

International Conference on Microelectronic Test Structures, 2003. - Polysilicon resistive heated scribe lane test structure for productive wafer level reliability monitoring of NBTI by Muth, W.; Martin, A.; von Hagen, J.; Smeets, D.; Fazekas, J. is a scholarly article available to read on EtoBox.

Author

Muth, W.; Martin, A.; von Hagen, J.; Smeets, D.; Fazekas, J.

Publisher

IEEE

Published

2003