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About this Engineering article
Cavity ring down detection of SiH3 in a remote SiH4 plasma and comparison with model calculations and mass spectrometry by W. M. M. Kessels; A. Leroux; M. G. H. Boogaarts; J. P. M. Hoefnagels; M. C. M. Van De Sanden; D. C. Schram is a Engineering article available to read on EtoBox.
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- Author
- W. M. M. Kessels; A. Leroux; M. G. H. Boogaarts; J. P. M. Hoefnagels; M. C. M. Van De Sanden; D. C. Schram
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2001
- Field
- Engineering (Physical Sciences)