Opening book details…
About this Engineering article
Composition and Structure Characterization of WNx Films Produced by RF Reactive Sputtering by Lin (T.L.Lin), Dongliang; Yan, Bewda; Yu, Weili is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Lin (T.L.Lin), Dongliang; Yan, Bewda; Yu, Weili
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1990
- Language
- EN
- Field
- Engineering (Physical Sciences)
More by Lin (T.L.Lin), Dongliang; Yan, Bewda; Yu, Weili
Browse all works by Lin (T.L.Lin), Dongliang; Yan, Bewda; Yu, Weili