About this Engineering article
Oxidation Properties of Hydrogen-Terminated Si(001) Surfaces Following Use of a Hyperthermal Broad Atomic Oxygen Beam at Low Temperatures by Tagawa, Masahito; Yokota, Kumiko; Ohmae, Nobuo; Kinoshita, Hiroshi; Umeno, Masataka is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Tagawa, Masahito; Yokota, Kumiko; Ohmae, Nobuo; Kinoshita, Hiroshi; Umeno, Masataka
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2001
- Field
- Engineering (Physical Sciences)