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Oxidation Properties of Hydrogen-Terminated Si(001) Surfaces Following Use of a Hyperthermal Broad Atomic Oxygen Beam at Low Temperatures by Tagawa, Masahito; Yokota, Kumiko; Ohmae, Nobuo; Kinoshita, Hiroshi; Umeno, Masataka is a Engineering article available to read on EtoBox.

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Author
Tagawa, Masahito; Yokota, Kumiko; Ohmae, Nobuo; Kinoshita, Hiroshi; Umeno, Masataka
Publisher
Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
Published
2001
Field
Engineering (Physical Sciences)