About this scholarly article

SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Integrated Circuit Metrology, Inspection, and Process Control IX - Direct measurement of optical constants of metals from a KrF excimer using polarization methods by Turgut, Suleyman; Smith, Bruce W.; Bennett, Marylyn H. is a scholarly article available to read on EtoBox.

Author

Turgut, Suleyman; Smith, Bruce W.; Bennett, Marylyn H.

Publisher

SPIE

Published

1995