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About this Materials Science article
Hardness of C, CNx and AlN thin films after rapid thermal annealing by G. Beshkov; G.P. Vassilev; M.R. Elizalde; T. Gomez-Acebo is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- G. Beshkov; G.P. Vassilev; M.R. Elizalde; T. Gomez-Acebo
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0254-0584)
- Published
- 2003
- Language
- EN
- Field
- Materials Science (Physical Sciences)