Can I read Cross-Shaped PnC for MEMS Resonator Q Factor on EtoBox?

Cross-Shaped PnC for MEMS Resonator Q Factor by mohadam361 is a document available to read on EtoBox.

What is Cross-Shaped PnC for MEMS Resonator Q Factor about?

This paper introduces a cross-shaped phononic crystal (PnC) design to reduce anchor loss in thin-film aluminum nitride-on-silicon MEMS resonators, enhancing the quality factor (Q) from 21,180 to 221,536. The study analyzes the effects of tether width, length, and design geometry on the resonator

Author

mohadam361

Language

EN