Opening book details…
About this Engineering article
Uncertainty Analysis Method Including Influence of Probe Alignment on On-Wafer Calibration Process by Sakamaki, Ryo; Horibe, Masahiro is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Sakamaki, Ryo; Horibe, Masahiro
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0018-9456)
- Published
- 2019
- Field
- Engineering (Physical Sciences)