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About this Engineering article
Micro Patterning Using UV-Nanoimprint Process by Goto, Hiroshi; Hagiwara, Akihiko; Ishibashi, Kentaro; Kokubo, Mitsunori; Okuyama, Hiroshi; Fukuyama, Satoshi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Goto, Hiroshi; Hagiwara, Akihiko; Ishibashi, Kentaro; Kokubo, Mitsunori; Okuyama, Hiroshi; Fukuyama, Satoshi
- Publisher
- Japan Science and Technology Information Aggregator, Electronic; The Technical Association of Photopolymers, Japan; Technical Association of Photopolymers; Technical Association of Photopolymers, Japan (ISSN 0914-9244)
- Published
- 2007
- Field
- Engineering (Physical Sciences)