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A fine pitch MEMS probe unit for flat panel display as manufacturing MEMS application by Bong-Hwan Kim; Sang-Jun Park; Kukjin Chun; Dong-Il Cho; Woong-Ki Park; Tae-Un Jun; Soo Yun is a Engineering article available to read on EtoBox.
What is A fine pitch MEMS probe unit for flat panel display as manufacturing MEMS application about?
A new fine pitch blade-type probe unit, which is capable of a pitch of 40 m and a force of 8.5g at 7.5 m scrub, was developed using MEMS technology. The fabricated and assembled probe planarity and x-y alignment were about ±6 and ±8 m, respectively. MEMS probe unit successfully achieved stabile probing during the test, even with large panel. The characteristics of probe units were satisfied with current conventional type probe unit specifications. The leakage current between one pin and the other pins was less than 1 nA. In addition, contact resistance less than 0.5 . This probe unit is suitable for flat panel displays (FPD), which is highlighted as the next generation displays such as liquid crystal displays (LCD) and plasma display panels (PDP). In particular, this probe unit focused on thin-film transistor LCDs (TFT-LCD). The probe was fabricated with 4 in. silicon wafer as the main body and the blade was fabricated with a nickel plate.
Who reads A fine pitch MEMS probe unit for flat panel display as manufacturing MEMS application?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Bong-Hwan Kim; Sang-Jun Park; Kukjin Chun; Dong-Il Cho; Woong-Ki Park; Tae-Un Jun; Soo Yun
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)