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About this Engineering article
Non-contact Removal of 60-Nm Latex Particles from Silicon Wafers with Laser-induced Plasma by Varghese, Ivin; Cetinkaya, Cetin is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Varghese, Ivin; Cetinkaya, Cetin
- Publisher
- Taylor and Francis Group; Informa UK (Taylor & Francis); Taylor & Francis; Informa UK Limited; Brill (ISSN 0169-4243)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)