About this scholarly article

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Micromachined negative thermal expansion thin films by Sutton, M.S.; Talghader, J. is a scholarly article available to read on EtoBox.

Author

Sutton, M.S.; Talghader, J.

Publisher

IEEE

Published

2003

Language

EN