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About this Engineering article
Fabrication of Step and Flash Imprint Lithography Templates Using a Variable Shaped-beam Exposure Tool by William J. Dauksher; David Mancini; Kevin Nordquist; Douglas J. Resnick; Peter Hudek; Dirk Beyer; Tim Groves; Olaf Fortagne is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- William J. Dauksher; David Mancini; Kevin Nordquist; Douglas J. Resnick; Peter Hudek; Dirk Beyer; Tim Groves; Olaf Fortagne
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)