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About this Engineering article
Improvement in the leakage current characteristic of metal-insulator-metal capacitor by adopting RuO2 film as bottom electrode by Han, Jeong Hwan; Han, Sora; Lee, Woongkyu; Lee, Sang Woon; Kim, Seong Keun; Gatineau, Julien; Dussarrat, Christian; Hwang, Cheol Seong is a Engineering article available to read on EtoBox.
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- Author
- Han, Jeong Hwan; Han, Sora; Lee, Woongkyu; Lee, Sang Woon; Kim, Seong Keun; Gatineau, Julien; Dussarrat, Christian; Hwang, Cheol Seong
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2011
- Language
- EN
- Field
- Engineering (Physical Sciences)