About this Engineering article
F and Cl detection limits in secondary ion mass spectrometry measurements of Si and SiO[sub 2] samples by Pivovarov, A. L.; Guryanov, G. M. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Pivovarov, A. L.; Guryanov, G. M.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2010
- Language
- EN
- Field
- Engineering (Physical Sciences)