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About this Physics and Astronomy article
Structural and Electrical Properties of Ultrathin Niobium Nitride Films Grown by Atomic Layer Deposition by Linzen, S; Ziegler, M; Astafiev, O V; Schmelz, M; Hübner, U; Diegel, M; Il’ichev, E; Meyer, H-G is a Physics and Astronomy article available to read on EtoBox.
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- Author
- Linzen, S; Ziegler, M; Astafiev, O V; Schmelz, M; Hübner, U; Diegel, M; Il’ichev, E; Meyer, H-G
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0953-2048)
- Published
- 2017
- Field
- Physics and Astronomy (Physical Sciences)