About this scholarly article

10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) - Dual frequency silicon nitride film of low thermal budget for pre-metal dielectric applications in sub-0.25 μm devices by Yuxiang Wang, ; Lee, J.H.; Thakur, B.; Huang, J. is a scholarly article available to read on EtoBox.

Author

Yuxiang Wang, ; Lee, J.H.; Thakur, B.; Huang, J.

Publisher

IEEE

Published

1999

Language

EN