About this Engineering article
Loss reduction of Si optical waveguides by beam step-size fracturing technique in electron beam lithography by Atsumi, Yuki; Taksatorn, Nit; Nishiyama, Nobuhiko; Miyamoto, Yasuyuki; Arai, Shigehisa is a Engineering article available to read on EtoBox.
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- Author
- Atsumi, Yuki; Taksatorn, Nit; Nishiyama, Nobuhiko; Miyamoto, Yasuyuki; Arai, Shigehisa
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2014
- Language
- EN
- Field
- Engineering (Physical Sciences)