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About this Chemistry article
Microwave-assisted vapor phase dissolution of photoresist and silicon oxide based slurry samples for the determination of trace impurities by high resolution ICP-MS by Wan, Chia-Ching; Jiang, Shiuh-Jen; You, Min-Ta; Sahayam, A. C. is a Chemistry article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Chemistry.
- Author
- Wan, Chia-Ching; Jiang, Shiuh-Jen; You, Min-Ta; Sahayam, A. C.
- Publisher
- Royal Society of Chemistry; The Royal Society of Chemistry; Royal Society of Chemistry (RSC) (ISSN 0267-9477)
- Published
- 2005
- Language
- EN
- Field
- Chemistry (Physical Sciences)
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