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About this Engineering article

Characteristics of TiOx films prepared by chemical vapor deposition using tetrakis-dimethyl-amido-titanium and water by Gyeong Taek Lim; Do-Heyoung Kim is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Gyeong Taek Lim; Do-Heyoung Kim
Publisher
Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
Published
2006
Language
EN
Field
Engineering (Physical Sciences)