Opening book details…
About this Engineering article
Turbomolecular pumps designed for plasma processes industry. Turbomolekularpumpen speziell für die Plasmaindustrie by R. Cerruti; S. Giors; W. Vissers is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- R. Cerruti; S. Giors; W. Vissers
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); John Wiley & Sons Ltd.; Wiley (ISSN 0947-076X)
- Published
- 2005
- Field
- Engineering (Physical Sciences)