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About this Engineering article
Squeeze film damping effect on the dynamic response of a MEMS torsion mirror by Pan, Feixia; Kubby, Joel; Peeters, Eric; Tran, Alex T; Mukherjee, Subrata is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Pan, Feixia; Kubby, Joel; Peeters, Eric; Tran, Alex T; Mukherjee, Subrata
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing; ScienceOpen (ISSN 0960-1317)
- Published
- 1998
- Field
- Engineering (Physical Sciences)
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